AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)‐based Single‐source Precursors**

Publisher： John Wiley & Sons Inc

E-ISSN： 1521-3862|21|1-2-3|71-77

ISSN： 0948-1907

Source： CHEMICAL VAPOR DEPOSITION (ELECTRONIC), Vol.21, Iss.1-2-3, 2015-03, pp. : 71-77

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