Fabrication of Three-Dimensional MIS Nano-Capacitor Based on Nanoimprinted Single Crystal Silicon Nanowire Arrays
Publisher: Bentham Science Publishers
E-ISSN: 1876-4037|4|4|333-338
ISSN: 1876-4029
Source: Micro and Nanosystems, Vol.4, Iss.4, 2012-12, pp. : 333-338
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Abstract