Drop-On-Demand Inkjet Printing of SU-8 Polymer

Publisher: Bentham Science Publishers

E-ISSN: 1876-4037|1|1|63-67

ISSN: 1876-4029

Source: Micro and Nanosystems, Vol.1, Iss.1, 2009-03, pp. : 63-67

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Abstract

This paper presents drop-on-demand inkjet printing of SU-8 on functionalized surfaces for direct printing of computer controlled polymer patterns. The high viscosity of SU-8 required an in-depth investigation of the print parameters such as pulse amplitude, pulse length and temperature in the piezo-actuated nozzle. The results show that the optimal drop velocity to obtain a stable printing is ∼2 ms-1 which corresponds to pulse amplitude and length of 220 V and 70-80 μs, respectively. The diameter of the SU-8 drop was reduced from 117 μm on non-treated silicon to 58 μm on a surface terminated by a silane-based self-assembled monolayer.