Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals

Author： Sharma S   Mishra S K   Kaw P K   Das A   Sirse N   Turner M M  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|2|25037-25044

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.2, 2015-04, pp. : 25037-25044

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