Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

Author： Liu Yong-Xin   Zhang Quan-Zhi   Liu Jia   Song Yuan-Hong   Bogaerts Annemie   Wang You-Nian  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.2, 2013-04, pp. : 25012-25022

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