Metal-assisted chemical etching for very high aspect ratio grooves in n-type silicon wafers

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Journal of Micromechanics and Microengineering, Vol. 24, Iss. 12, 2014-12 ,pp. : 125026-125031

IOP Publishing

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Fabrication of silicon nanowire arrays by near-field laser ablation and metal-assisted chemical etching

By Brodoceanu D   Alhmoud H Z   Elnathan R   Delalat B   Voelcker N H   Kraus T  

Nanotechnology, Vol. 27, Iss. 7, 2016-02 ,pp. : 75301-75308

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Nano-silver arrays assisted chemical etching and catalysed texturing of silicon wafers for solar cells

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International Journal of Nanomanufacturing, Vol. 9, Iss. 3-4, 2013-08 ,pp. : 213-220

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Effect of AgNO 3 concentration on structure of aligned silicon nanowire arrays fabricated via silver-assisted chemical etching

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International Journal of Nanotechnology, Vol. 10, Iss. 3-4, 2013-04 ,pp. : 343-350

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Large area fabrication of vertical silicon nanowire arrays by silver-assisted single-step chemical etching and their formation kinetics

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