Modeling and experimental verification of thermally induced residual stress in RF-MEMS

Author: Somà Aurelio   Somà Aurelio  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|5|55007-55021

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55007-55021

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Abstract