μ-biomimetic flow-sensors—introducing light-guiding PDMS structures into MEMS

Author: Herzog Hendrik   Klein Adrian   Bleckmann Horst   Holik Peter   Schmitz Sam   Siebke Georg   Tätzner Simon   Lacher Manfred   Steltenkamp Siegfried  

Publisher: IOP Publishing

E-ISSN: 1748-3190|10|3|36001-36014

ISSN: 1748-3190

Source: Bioinspiration & Biomimetics, Vol.10, Iss.3, 2015-06, pp. : 36001-36014

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