Piezoelectric MEMS array package for distributed CMP pressure control

Author： Mayyas Mohammad  

Publisher： IOP Publishing

E-ISSN： 1361-665X|24|6|65006-65023

ISSN： 0964-1726

Source： Smart Materials and Structures, Vol.24, Iss.6, 2015-06, pp. : 65006-65023

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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