Author： Nam Eunseok Lee Chan-Young Jun Martin B G Min Byung-Kwon
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|4|45021-45028
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 45021-45028
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