Spatio-temporally resolved electron temperature in argon radio-frequency capacitive discharge at atmospheric pressure

Author： Park Sanghoo   Choe Wonho   Park Sanghoo   Park Sanghoo  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|3|32006-32012

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 32006-32012

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