Unintentional gallium incorporation in AlN and its impact on the electrical properties of GaN/AlN and GaN/AlN/AlGaN heterostructures

Author: Li Haoran   Keller Stacia   Chan Silvia H   Lu Jing   DenBaars Steven P   Mishra Umesh K  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|5|55015-55021

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.5, 2015-05, pp. : 55015-55021

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