Pure AlN layers in metal-polar AlGaN/AlN/GaN and AlN/GaN heterostructures grown by low-temperature ammonia-based molecular beam epitaxy

Author: Kaun Stephen W   Mazumder Baishakhi   Fireman Micha N   Kyle Erin C H   Mishra Umesh K   Speck James S  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|5|55010-55017

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.5, 2015-05, pp. : 55010-55017

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