Molecular dynamics simulation on the initial stage of 1 eV carbon deposition on silicon

Author: Philipp Patrick   Jana Arindam   Briquet Ludovic G V   Wirtz Tom   Henrion Gérard  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|26|265303-265310

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.26, 2015-07, pp. : 265303-265310

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Abstract