Lithography: “Multipoint Force Feedback” Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography (Small 35/2015)

Publisher： John Wiley & Sons Inc

E-ISSN： 1613-6829|11|35|4413-4413

ISSN： 1613-6810

Source： SMALL, Vol.11, Iss.35, 2015-09, pp. : 4413-4413

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