“Multipoint Force Feedback” Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography

Publisher: John Wiley & Sons Inc

E-ISSN: 1613-6829|11|35|4526-4531

ISSN: 1613-6810

Source: SMALL, Vol.11, Iss.35, 2015-09, pp. : 4526-4531

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Abstract