Influence of Tetramethyldisiloxane‐Oxygen Mixtures on the Physical Properties of Microwave PECVD Coatings and Subsequent Post‐Plasma Reactions

Publisher： John Wiley & Sons Inc

E-ISSN： 1612-8869|12|6|555-563

ISSN： 1612-8850

Source： PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.12, Iss.6, 2015-06, pp. : 555-563

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