How to supply a CVD reactor with a steady‐state mixture of two precursors vaporized from a single heated boat

E-ISSN： 1862-6319|212|7|1527-1532

ISSN： 1862-6300

Source： PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.7, 2015-07, pp. : 1527-1532

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