In‐situ observation of chemical vapor deposition using SiHCl3 and BCl3 gases

Publisher： John Wiley & Sons Inc

E-ISSN： 1610-1642|12|7|953-957

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.7, 2015-07, pp. : 953-957

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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