New advances in polysilicon processes correlating feedstock properties and good crystal and wafer performances

Publisher： John Wiley & Sons Inc

E-ISSN： 1610-1642|9|10‐11|2062-2070

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.9, Iss.10‐11, 2012-10, pp. : 2062-2070

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Effects of Relative Velocity on Grinding Performances under Si Wafer Rotary Grinding

By  

Materials Science Forum, Vol. 2016, Iss. 874, 2016-11 ,pp. : 395-400

Trans Tech Publications

Access to resources Recommend Favorite

Crystal Structure and Optical Properties of a New Nonlinear Optical Chalcone Crystal

By Ganapayya B.  

Molecular Crystals and Liquid Crystals, Vol. 571, Iss. 1, 2013-01 ,pp. : 87-98

Taylor & Francis Ltd

Access to resources Recommend Favorite

Scaling wafer stresses and thermal processes to large wafers

By Nilson R.H.   Griffiths S.K.  

Thin Solid Films, Vol. 315, Iss. 1, 1998-03 ,pp. : 286-293

Elsevier

Access to resources Recommend Favorite

A new type of liquid crystal involving hydrogen bonding: single crystal X-ray structure characterization and properties of the liquid crystal

By Song X.   Li J.   Liu G.   Zhang S.   Ye C.   Chen E.  

Liquid Crystals, Vol. 29, Iss. 12, 2002-12 ,pp. : 1533-1537

Taylor & Francis Ltd

Access to resources Recommend Favorite

Properties of furnace crystallized polysilicon films prepared by r.f. sputtering

By Sun Z.   Tong K.Y.   Lee W.B.  

Thin Solid Films, Vol. 288, Iss. 1, 1996-11 ,pp. : 224-228

Elsevier

Access to resources Recommend Favorite