Direct‐write X‐ray lithography using a hard X‐ray Fresnel zone plate
Publisher： John Wiley & Sons Inc
E-ISSN： 1600-5775|22|3|781-785
ISSN： 0909-0495
Source： JOURNAL OF SYNCHROTRON RADIATION (ELECTRONIC), Vol.22, Iss.3, 2015-05, pp. : 781-785
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