Anchor-free NEMS non-volatile memory cell for harsh environment data storage

Author: Singh Pushpapraj   Kim Tony Tae-Hyoung          

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115007-115013

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