Author: Lu Zonghuan Barnard David Shaikh Tanvir R Meng Xing Mannella Carmen A Yassin Aymen S Agrawal Rajendra K Wagenknecht Terence Lu Toh-Ming
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115001-115009
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