Simulation and experimental study of maskless convex corner compensation in TMAH water solution

Author: Smiljanić Milče M   Radjenović Branislav   Radmilović-Radjenović Marija   Lazić Žarko   Jović Vesna  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115003-115011

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