Influence of transparent conductive oxides on passivation of a-Si:H/c-Si heterojunctions as studied by atomic layer deposited Al-doped ZnO

Author： Macco B   Deligiannis D   Smit S   van Swaaij R A C M M   Zeman M   Kessels W M M  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.29, Iss.12, 2014-12, pp. : 122001-122005

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