Texture, Microstructure, and Tribological Behavior in TiAlN/SiNx Multilayers

Author： Chan Yu-Chen   Chen Hsien-Wei   Duh Jenq-Gong   Lee Jyh-Wei  

Publisher： Blackwell Publishing

E-ISSN： 1744-7402|11|3|611-617

ISSN： 1546-542X

Source： International Journal of Applied Ceramic Technology, Vol.11, Iss.3, 2014-05, pp. : 611-617

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