Analysis of macroparticle charging in the near-electrode layer of a high-frequency capacitive discharge

Author： Vaulina O. Samarian A. James B. Petrov O. Fortov V.

ISSN： 1063-7761

Source： Journal of Experimental and Theoretical Physics, Vol.96, Iss.6, 2003-06, pp. : 1037-1044

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