Diffuse x-ray scattering study of the formation of microdefects in heat-treated dislocation-free large-diameter silicon wafers

Author： Bublik V. Matsnev S. Shcherbachev K. Mezhennyi M. Mil’vidskii M. Reznik V.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.45, Iss.10, 2003-10, pp. : 1918-1925

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