Sputtering of AlxGa1−x As semiconductor targets by Ar+ ions with energies of 2–14 keV

Author: Berg N.   Soshnikov I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.42, Iss.6, 1997-06, pp. : 688-691

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content