Mechanism of the rf sputtering of mixed oxides

Author: Mukhortov V.   Tolmachev G.   Golovko Yu.   Mashchenko A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.43, Iss.9, 1998-09, pp. : 1097-1101

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