Microdoping of subsurface gallium arsenide layers with hydrogen ions

Author: Anisimov V.   Demkin V.   Kvint I.   Mel’nichuk S.   Semukhin B.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.45, Iss.2, 2000-02, pp. : 260-262

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