Peculiarities of the growth kinetics of silicon-germanium alloy layers from silane and germane with an additional heated element in the vacuum chamber

Author： Orlov L.   Potapov A.   Ivin S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.45, Iss.6, 2000-06, pp. : 770-775

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