Role of masking oxide on the silicon surface on defect formation in SIMOX structures

Author: Askinazi A.   Baraban A.   Miloglyadova L.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.47, Iss.5, 2002-05, pp. : 574-577

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