Low-temperature radiation-stimulated gettering of impurities and defects in silicon by layers of porous silicon

Author： Kulikov A.   Perevoshchikov V.   Skupov V.   Shengurov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.23, Iss.7, 1997-07, pp. : 507-508

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