Regular relief on a silicon surface as a structural defect getter

Author： Berman L.   Grekhov I.   Kostina L.   Belyakova E.   Kim E.   Kim S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.25, Iss.1, 1999-01, pp. : 32-34

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