Electronic energy spectrum of the sheath of an asymmetric low-pressure capacitive rf discharge

Author： Aleksandrov A.   Rukhadze A.   Savinov V.   Singaevski I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.25, Iss.10, 1999-10, pp. : 772-774

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