Subnanometer resolution in depth profiling using glancing Auger electrons

Author： Drozdov M.   Danil’tsev V.   Drozdov Yu.   Khrykin O.   Shashkin V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.27, Iss.2, 2001-02, pp. : 114-117

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