Photoablation of thin indium oxide films under the action of a pulsed arf excimer laser

Author: Kaliteevskaya N.   Seisyan R.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.28, Iss.3, 2002-03, pp. : 179-180

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