Kinetics of the reactions involving CF2 and CF in a pure tetrafluoromethane plasma: I. Production of CF2 and CF via electron-impact dissociation

Author： Ivanov V.   Klopovskii K.   Lopaev D.   Proshina O.   Rakhimov A.   Rakhimova T.   Rulev G.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.28, Iss.3, 2002-03, pp. : 229-242

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