Kinetics of the reactions involving CF2 and CF in a pure tetrafluoromethane plasma: II. Production and loss of CF2 and CF in the processes of fluorocarbon polymerization

Author： Ivanov V.   Klopovskii K.   Lopaev D.   Proshina O.   Rakhimov A.   Rakhimova T.   Rulev G.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.28, Iss.3, 2002-03, pp. : 243-257

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