Characteristics of molecular hydrogen and CH* radicals in a methane plasma in a magnetically enhanced capacitive RF discharge

Author： Avtaeva S. Lapochkina T.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.33, Iss.9, 2007-09, pp. : 774-785

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