A prototyping and microfabrication CAD/CAM tool for the excimer laser micromachining process

Author: Mutapcic Emir   Iovenitti Pio   Hayes Jason  

Publisher: Springer Publishing Company

ISSN: 0268-3768

Source: The International Journal of Advanced Manufacturing Technology, Vol.30, Iss.11-12, 2006-10, pp. : 1076-1083

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