Oxidation states of GaAs surface and their effects on neutral beam etching during nanopillar fabrication

Author： Thomas C   Tamura Y   Syazwan M E   Higo A   Samukawa S  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.21, 2014-05, pp. : 215203-215213

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