Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium

Author： Maszl C   Breilmann W   Benedikt J   von Keudell A  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.22, 2014-06, pp. : 224002-224014

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