Optical Constants of SiO2 Films Deposited on Si Substrates

Author： Yi-Qin Ji   Yu-Gang Jiang   Hua-Song Liu   Li-Shuan Wang   Dan-Dan Liu   Cheng-Hui Jiang   Rong-Wei Fan   De-Ying Chen  

Publisher： IOP Publishing

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.31, Iss.4, 2014-04, pp. : 46401-46404

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