Combining focused ion beam and atomic layer deposition in nanostructure fabrication

Author: Han Zhongmei   Vehkamäki Marko   Leskelä Markku   Ritala Mikko  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.11, 2014-03, pp. : 115302-115306

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