Bonding of SU-8 to glass for gastight picoliter reactors allowing in situ optical observation

Author: Petrova Elena V   Aich Anupam   Byington Michael C   Vekilov Peter G  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 105003-105010

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