An EpoClad/EpoCore-based platform for MOEMS fabrication

Author: Guan Tiannan   Puers Robert   Ceyssens Frederik  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125005-125014

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