Temperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon

Author: Ouyang Jing   McDonald Margaret   Zhu Yong  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125036-125045

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