A local bottom-gate structure with low parasitic capacitance for dielectrophoresis assembly and electrical characterization of suspended nanomaterials

Author： Wang Tun   Liu Bin   Jiang Shusen   Rong Hao   Lu Miao  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.5, 2014-05, pp. : 55025-55031

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